NTS Series Robot

The NTS series robot can access 2 and 3 FOUPs of EFEM without a track. ...

Details

The NTS series robot can access 2 and 3 FOUPs of EFEM without a track. The specially designed drive system enables the robot to move incredibly smoothly and with high precision.

The series is compliant with the SEMI-F47 standard as well as the SEMI-S2 standard.

 

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